ADVANCED MERIE TECHNOLOGY FOR HIGH-VOLUME 0.25-MU-M GENERATION CRITICAL DIELECTRIC ETCH

Authors
LINDLEY R BJORKMAN C SHAN HC PU B DOAN K WANG ZX
Citation
R. Lindley et al., ADVANCED MERIE TECHNOLOGY FOR HIGH-VOLUME 0.25-MU-M GENERATION CRITICAL DIELECTRIC ETCH, Solid state technology, 40(8), 1997, pp. 93
Citations number
4
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
40
Issue
8
Year of publication
1997
Database
ISI
SICI code
0038-111X(1997)40:8<93:AMTFH0>2.0.ZU;2-4