Light collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron microscopy

Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to li ght losses transport in the optical part of the detector. A model is propos ed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for vario us designs are presented.