A single-crystal Si-resonator with on-chip readout amplifier in standard CMOS

The monolithic integration of electronic circuits in standard CMOS technolo gy with high aspect ratio micromechanical structures based on single-crysta l silicon is presented. For this technology neither silicon on insulator (S OI) wafers nor wet processes are required. A resonator device is chosen for technology demonstration. The effect of micromachining on parameters of CM OS transistors is detected and the usefulness of a final annealing step is confirmed. A novel electronic circuit design allows signal processing, even for low resonator signal levels and strong parasitic effects. (C) 2001 Els evier Science B.V. All rights reserved.