Low temperature NO2 sensitivity of nano-particulate SnO2 film for work function sensors

Work function based investigations of NO2 sensitivity of tin oxide (SnO2) n ano-particulate films were carried out at low temperatures under different humidity conditions. A simple preparation technique was employed to obtain stoichiometric nano-particulate SnO2 films. The nano-particles size was det ermined by atomic force microscopy (AFM) and the work function measurements were done at 130 degreesC by a computer controlled Kelvin probe setup. The samples were subjected to dry and wet (30, 50, and 60% r.h.) air containin g different concentrations of NO2. The results suggest that the sensor film s containing particles of average 15 nm size show good sensitivity to NO2, we obtain similar to 100 mV work function change to 5 ppm concentration at 130 degreesC. Also a little influence of humidity on the work function is o bserved. Further, during measurements base line drift was not seen which su ggests that the poisoning is not occurring on the film surface due to NO2 i nteraction. This is an important parameter for the Iona term operation of a sensor. This results indicate that nano-particulate film Of SnO2 is suitab le for work function based NO2 sensors like field effect transistors (FET) based sensors operating at 130 degreesC. (C) 2001 Elsevier Science B.V. All rights reserved.