New technology for multi-sensor silicon needles for biomedical applications

A multi-sensor silicon needle including two ion-sensitive field effect tran sistor (ISFET) sensors, a platinum pseudo-reference electrode (Pt) and a te mperature sensor has been fabricated by using a CMOS-compatible technology and silicon micromachining. This paper presents a summary of the fabricatio n process and results of the device characterisation. The feasibility of th e fabrication technology has been demonstrated and all devices have operate d satisfactorily, with a response showing good sensitivity and linearity. T he multi-sensor has been developed for the detection of myocardial ischemia during cardiac surgery. (C) 2001 Elsevier Science B.V. All rights reserved .