Plasma based ionic implantation (PBII) is a new alternative to conventional
ion implantation to produce near-surface treatments, layer growth or semic
onductor doping, with the advantage of being non-directional. Furthermore,
it can be used for improving the corrosion, friction and wear resisting pro
perties of materials. This paper describes the development of a thermally a
ssisted plasma immersion implantation reactor (TAPIIR). The system aimed at
treating samples in the 0.5-60 keV range, with temperature regulation up t
o 1000 degreesC. Thermochemical treatments, like the nitriding of steels or
aluminium, are studied with a separate implantation and diffusion paramete
r control. (C) 2001 Elsevier Science BN. All rights reserved.