Plasma ion implantations from cathodic arc plasmas of the Ti-Si-N and Ti-B-
N systems are performed into hardened high speed steel with pulsed bias vol
tages of -5 to -20 kV at working gas pressures of 10(-2) and 4 X 10(-3) mba
r as well as at substrate temperatures of 200 and 300 degreesC. The samples
are characterized by tribological investigations. Coatings deposited with
substantially shuttered direct particle impact from the cathodic arc source
show the highest wear resistance. (C) 2001 Elsevier Science B.V. All right
s reserved.