We deposited protective coatings on polycarbonates from hexamethyldisiloxan
e (HMDSO) and HMDSO/O-2 mixtures by the plasma enhanced CVD method. In part
icular, we studied deposition rate, optical constants in UV/VIS, film compo
sition and mechanical properties dependent on rf power and oxygen to HMDSO
flow rate ratio. Plasma polymer HMDSO films (PP-HMDSO) showed good transpar
ency in the visible and increased absorption in UV region. The optical cons
tants of HMDSO/O-2 films were similar to the tabulated SiO2. In general, th
e films were characterised by a relatively high content of hydrogen (22-66%
) and a carbon content below 20%. The films deposited at an oxygen-to-HMDSO
flow rate ratio higher than 15 exhibited higher tensile stress and higher
hardness than those prepared at ratios of 5-10. The nature of the internal
stress changed to compressive for PP-HMDSO. Plasma pre-treatment of polycar
bonate in argon significantly improved the film adherence, especially when
low powers and short treatment times were used. (C) 2001 Elsevier Science B
.V. All right reserved.