Transparent BCN coatings by RF PACVD at low temperature using metallo-organic precursors

The deposition of transparent BCN was carried out on polycarbonate substrat es by means of different radio frequency plasma assisted CVD systems (induc tively coupled RIF PACVD and capacitively coupled RF PACVD). We have used d ifferent metallo-organics as precursors which are N-trimethylborazine (TMB) and N-pyrrolidino diethylamine (PMB). By varying the deposition parameters (plasma power, reactor pressure and substrate temperature) coatings were p repared with hardness values ranging from 677 to 1400 Hk0.005. The surface roughness of the deposited layers was measured by profilometry. It was foun d that the deposited layers were transparent, smooth, dense and stable in r oom ambient. The deposited films have it high transmission in the UV-visibl e region measured by UV/vis-spectroscopy and have a low refractive index (1 .22-1.52) investigated by ellipsometry. (C) 2001 Elsevier Science B.V. All rights reserved.