The use of preliminary ion implantation and heating on the substrate for modifying TiN coating properties and TiN/substrate interface

The influence of preliminary implantation of argon ions on a carbon steel s ubstrate and deposition temperature on the texture and adhesion of TiN coat ings deposited by cathodic arc plasma deposition has been investigated. The samples have been evaluated by glancing X-ray diffraction, Auger-electron spectroscopy and scratch adhesion testing. Strengthening of the (220) TiN t exture with increasing ion implantation dose on the substrate has been reve aled. An increment of deposition temperature (from 450 up to 720 K) leads t o a more chaotic orientation of TiN crystallites. An increase of transition al layer thickness (by 60%, for the Ti profile) is only observed when depos iting the coating at high temperature (720 K). However, both the preliminar y implantation process and the heating of the substrate lead to an adhesion improvement of TiN coatings. (C) 2001 Elsevier Science B.V. All rights res erved.