Mechanism of thermal decomposition of silanes

Data on the mechanism of thermal decomposition of silanes are generalised. The main stages of the process are distinguished and characterised. Attenti on is concentrated on the elementary homogeneous reactions, deposition of s ilicon from the gas phase and formation of aerosols. Various models of form ation of aerosols are considered. The results of theoretical and experiment al investigations of this process are discussed. Data on the chemical decom position of the solid product of silane pyrolysis (wall deposit and aerosol particles) are presented. It is noted that the hydrogen content in the sol id product varies over wide limits.