Data on the mechanism of thermal decomposition of silanes are generalised.
The main stages of the process are distinguished and characterised. Attenti
on is concentrated on the elementary homogeneous reactions, deposition of s
ilicon from the gas phase and formation of aerosols. Various models of form
ation of aerosols are considered. The results of theoretical and experiment
al investigations of this process are discussed. Data on the chemical decom
position of the solid product of silane pyrolysis (wall deposit and aerosol
particles) are presented. It is noted that the hydrogen content in the sol
id product varies over wide limits.