The morphology and structure of BN and B4C nanocrystals in thin layers prod
uced on Si substrates by plasma-enhanced chemical vapor deposition from tri
ethylamineborane were studied before and after exposure to synchrotron radi
ation. The as-deposited layers consisted of two types of nanocrystals diffe
ring in shape, which all had a defect diamond-like structure. After irradia
tion, two types of nanocrystals were also observed, but the layers consiste
d of cubic BN, hexagonal BN, and rhombohedral B4C with lattice parameters d
iffering from those of bulk materials. These results were interpreted as ev
idence that the irradiated layers contained "centaurs"-intergrowths of diff
erent structures with coherent interfaces.