Thermodynamic and kinetic criteria to select hydrocarbon precursor

Several hydrocarbons are available to provide carbon to a deposit. In the c ase of silicon carbide epitaxy, propane is usually used as precursor though it is not stable under the conditions required by the process. In the pres ent paper, thermodynamic and kinetic criteria are used to compare hydrocarb on precursors with respect to their reactivity during their gas-phase trans portation in the CVD reactor. Tbe influence of propane, methane or acetylen e precursors is discussed according to residence time.