Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex

Authors
Alexandrov, SE Chistiakov, VA
Citation
Se. Alexandrov et Va. Chistiakov, Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex, J PHYS IV, 11(PR3), 2001, pp. 155-161
Citations number
7
Categorie Soggetti
Physics
Journal title
JOURNAL DE PHYSIQUE IV
ISSN journal
11554339 → ACNP
Volume
11
Issue
PR3
Year of publication
2001
Pages
155 - 161
Database
ISI
SICI code
1155-4339(200108)11:PR3<155:KOLOAN>2.0.ZU;2-P
Abstract
The main purpose of this paper is to summarise the results of an experiment al study of the LPCVD kinetics of aluminium nitride films based on the pyro lysis of the aluminium chloride complex with ammonia, AlCl3NH3. The conclus ions drawn are supported by the results of mass-spectrometry of the gas pha se reactants.