Structural properties of [(La0.7Sr0.3MnO3/SrTiO3)](15) superlattices prepared by pulsed injection-MOCVD

[La0.7Sr0.3MnO3/SrTiO3](15) superlattices (LSMO/STO) with different thickne ss of STO or LSMO layers were grown on the (001) surface of single crystal substrates (LaAlO3, SrTiO3 and Mgo) by pulsed liquid-injection MOCVD. Struc tural properties of the deposited superlattices were investigated by X-ray diffraction analysis. Theta /2 Theta scans indicated that LSMO and STO laye rs are highly (001) oriented and showed the satellite peaks characteristic of a superlattice structure. It was observed that the strain state in the s uperlattices depends on the relative thickness of the LSMO and STO layers a nd on the substrate nature.