The effect of the preparation procedure on the structure and properties of
nanoscale systems constitutes an interesting starting point for the prepara
tion of advanced materials for functional applications. In this work cobalt
oxides nanocrystalline thin films were synthesized by the Chemical Vapor D
eposition and sol-gel routes. In the first case, a Co(II) beta -diketonate
was employed as source compound in an oxygen atmosphere, whereas the sol-ge
l films were obtained by dip-coating from alcoholic solutions of cobalt ace
tate. The films were deposited on glassy substrates (SiO2, Indium Tin Oxide
) and subsequently annealed in different conditions in order to tailor thei
r composition from CoO to Co3O4 by a proper combination of the synthesis pa
rameters and thermal treatments. The microstructure of the samples was stud
ied by X-ray Diffraction (XRD) and optical absorption, while their surface
and in-depth chemical composition was analyzed by X-ray Photoelectron (XPS)
and (XE-AES) techniques. Atomic Force Microscopy (AFM) was employed to ana
lyze the surface morphology of the films. Particular emphasis was given to
the influence of the preparation route on the system features by a comparis
on of the results obtained by the two synthetic approaches.