A. Leonhardt et al., Chemical vapour deposition - a promising method for production of different kinds of carbon nanotubes, J PHYS IV, 11(PR3), 2001, pp. 445-451
Carbon nanostructures (fibres, multi and single walled tubes) have been syn
thesized by catalytic chemical vapour deposition. The catalyst material, de
position temperature and the used hydrocarbon are the main parameters respo
nsible for the formation of the desired structure. In dependence on these p
arameters and by optimising the deposition process nanofibres with herringb
one structure and tubular multiwalled nanotubes were deposited in large amo
unts and high purity. In the case of single wall nanotubes synthesis an aft
ertreatment and process is absolutely necessary to obtain material with hig
h percentage of tubes. Layers of disordered and aligned multiwalled nanotub
es were deposited on oxidised silicon substrates coated with thin sputtered
metal layers (Co, permalloy) by using the micro-wave assisted plasma CVD p
rocess or the bias supported hot filament CVD method. The latter method all
ows relatively low deposition temperatures (550 - 750 degreesC).
The obtained carbon modifications were characterised by scanning and transm
ission electron microscopy. Furthermore, the electron field emission of the
CNT's layers were investigated.