New volatile polyazolylborates of copper(I) for MOCVD

The volatility of new bis- and tetrakis-(pyrazolyl)borates of copper(I) wit h monodentate tertiary phosphines recently prepared has been prepared by th e reaction between CuCl, phosphine and KBH(2)pz(2) or KBpz(4) in CH3CN (Hpz is a pyrazole-type ligand) has been studied. The IR data in gas in a vast temperature region confirm the stability of precursors in vapour, suggestin g the molecular structure in vapour being similar to that determined previo usly by X-ray diffraction. The dependence of the volatility on the number o f the pyrazolyl-moieties and nature of phosphine is discussed. Film growth rates obtained from MOCVD experiments, as well as XRD and SEM data for copp er films deposited by using [CuH2B(pz)(2)(PMePh2)(2)] as precursor are repo rted.