In order to increase the gain length product for the Ha line (13.4 mn) of h
ydrogen-like Nitrogen in the "exploding type pumping" of irradiating a 30 n
m thick SiN membrane target with a few ps pulse, the pumping laser system i
s up-graded. For crucially important issue of suppressing a pre-pulse, the
energy of the front-end of the pumping laser system was increased by one or
der. Beam pattern of the pumping laser pulse on the vacuum chamber window w
as improved with an image relay. In order to start experiments of a water-w
indow laser, chirping pulse amplification in e-beam pumped KrF laser system
is planned.