Investigation of various capillary discharge schemes for incoherent EUV production

The investigation of different capillary discharges (fast capillary, ablati ve and EUV flash) powered by pulsed Blumlein type drivers is presented. A p arametric study has been performed on xenon fast capillary discharges. Char ging voltage, gas pressure, capillary volume (length and diameter) effects have been studied, emphasizing the crucial importance of power density for the efficient production of EUV radiation. First estimation of radiated ene rgy around 13.5 nm is finally presented. An irradiance of one hundred of mu J m(-2) at 75 cm from the xenon has been measured and this value will proba bly be enhanced through the optimization of the discharge. efficiency.