The investigation of different capillary discharges (fast capillary, ablati
ve and EUV flash) powered by pulsed Blumlein type drivers is presented. A p
arametric study has been performed on xenon fast capillary discharges. Char
ging voltage, gas pressure, capillary volume (length and diameter) effects
have been studied, emphasizing the crucial importance of power density for
the efficient production of EUV radiation. First estimation of radiated ene
rgy around 13.5 nm is finally presented. An irradiance of one hundred of mu
J m(-2) at 75 cm from the xenon has been measured and this value will proba
bly be enhanced through the optimization of the discharge. efficiency.