Applications of high repetition rate tabletop soft X-ray lasers become a reality in several fields

For many years researchers have envisioned the development of compact high repetition rate tabletop soft x-ray lasers that could be routinely used in application in numerous disciplines. With demonstrated average powers of se veral mW and millijoule-level pulse energy at 46.9nm, the Ne-like Ar capill ary discharge-pumped laser is the first compact laser to reach this goal. I n this paper we summarize the development status of high repetition rate ta bletop soft x-ray lasers based on capillary discharge excitation, and give examples of their successful use in several applications. Results of the us e of a capillary discharge pumped 46.9nm laser in dense plasma interferomet ry, soft x-ray of reflectometry for the determination of optical constants, characterization of diffraction gratings, laser ablation of materials, and plasma generation are described, The observation of lasing at 52.9 nm line in Ne-like Cl with output pulse energy up to 10 muJ is also reported.