Wavelet transform approach to the analysis of specular x-ray reflectivity curves

A method for analyzing x-ray reflectivity curves from multilayered structur es with interfacial roughness using a wavelet transform approach has been d eveloped. By using this approach, we have been able (1) to extract the cont ribution of a particular rough interface to a specular reflectivity curve, and (2) to determine the root-mean-square amplitude of the roughness of a p articular interface independently of the other interfaces in the multilayer ed structure from the specular reflectivity data. Analytical procedures tha t allow the interpretation of the wavelet coefficients obtained from specul ar reflectivity curves have been developed. This approach has been successf ully applied to experimental reflectivity curves obtained from Cu/Ta, Ta2O5 /Ta, and Ta2O5/Ta2N bilayer structures. (C) 2001 American Institute of Phys ics.