A novel spiral CMOS compatible micromachined thermoelectric IR microsensor

Citation
E. Socher et al., A novel spiral CMOS compatible micromachined thermoelectric IR microsensor, J MICROM M, 11(5), 2001, pp. 574-576
Citations number
12
Categorie Soggetti
Mechanical Engineering
Journal title
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
ISSN journal
09601317 → ACNP
Volume
11
Issue
5
Year of publication
2001
Pages
574 - 576
Database
ISI
SICI code
0960-1317(200109)11:5<574:ANSCCM>2.0.ZU;2-K
Abstract
A novel sensing structure and realization method is proposed for complement ary metal-oxide semiconductor (CMOS) compatible thermoelectric uncooled inf rared microsensors. The structure enables high sensitivity and excellent th ermal isolation in sensor pixels with small dimensions suitable for two-dim ensional thermal imaging. Front-side dry micromachining allows fast CMOS po st-processing, small pixel pitch and integration with on-chip CMOS readout. Prototype sensors with an area of 70 x 70 mum(2) achieved a measured noise equivalent power of 0.36 nW Hz(-1/2) and a response time of 3 ms.