Effects of thin film Nb interlayer in Cu/sapphire bonds

The effects of a thin film Nb interlayer on the microstructure and fracture energies of Cu/Nb/Al2O3 diffusion bonds have been studied by four-point be nd testing, TEM and SEM analyses. Single crystalline Cu and alpha -Al2O3 wi th different crystallographic orientations at the interface were used to de termine the influence of the orientation relationship (OR) on fracture resi stance. The Nb film interlayer deposited by electron beam evaporation on th e ceramic side prior to diffusion bonding was found to be polycrystalline a nd fiber-textured after diffusion bonding, with the close-packed plane (110 ) being parallel to the (0001) basal plane of sapphire. The introduction of the thin film Nb interlayer greatly improves the Cu/Al2O3 bond strength, w hereas diffusion bonding can be performed at a relatively low temperature ( 900 degreesC. The orientation relationship between Cu and alpha -Al2O3 crys tals at the interface strongly influences the fracture energy of the Cu/Nb/ Al2O3 bonds. The bonds with the OR Cu(100)[011]parallel to Al2O3(0001)[11 ( 2) over bar0] possess the highest fracture energies, exhibiting a ductile i nterface fracture mechanism. The much higher fracture energies obtained for the Cu/Nb/Al2O3 bonds relative to either Cu/Al2O3 or Nb/Al2O3 bonds are at tributed to the strong adhesion of Nb to alpha -Al2O3 combined with a large r plastic deformation in the metal side during fracture. (C) 2001 Elsevier Science B.V. All rights reserved.