An investigation into the use of sol-gel processing for the fabrication of
tellurite thin films from tellurium ethoxide precursor is described. The hy
drolysis and condensation of tellurium ethoxide are discussed, together wit
h the results of the decomposition process of its hydrolysis product under
air and argon atmospheres. The structural and morphological properties of t
he resulting tellurite films are characterised. The success in sol-gel proc
essing for tellurite materials provides new opportunities for making tellur
ite thin film devices with practical applications. (C) 2001 Elsevier Scienc
e B.V. All rights reserved.