Experience with laser microfabricated detectors at the University of Louisville

We have designed, produced, and tested several different types, of micropat terned gas proportional counters at the University of Louisville. A particu lar specialty has been the development and application of laser micromachin ing techniques to produce devices as the Microwell, GEM, and Microtube. Las er micromachining is a new technology with particular advantages for detect or fabrication, including the ability to produce novel structures, machine wells in thick substrates, and produce detector arrays well suited to inclu sion in modern microelectronics components. We report here the development of the Microwell detector and laser micromachining techniques for its produ ction. First results are also presented for the Microtube detector, a devic e with a reduced anode formed as a tube extending into the center of the we ll. (C) 2001 Elsevier Science B.V. Ali rights reserved.