Amorphous thin film growth: Effects of density inhomogeneities - art. no. 031506

Citation
M. Raible et al., Amorphous thin film growth: Effects of density inhomogeneities - art. no. 031506, PHYS REV E, 6403(3), 2001, pp. 1506
Citations number
34
Categorie Soggetti
Physics
Journal title
PHYSICAL REVIEW E
ISSN journal
1063651X → ACNP
Volume
6403
Issue
3
Year of publication
2001
Part
1
Database
ISI
SICI code
1063-651X(200109)6403:3<1506:ATFGEO>2.0.ZU;2-D
Abstract
A nonlinear stochastic growth equation for the spatiotemporal evolution of the surface morphology of amorphous thin films in the presence of potential density variations is derived from the relevant physical symmetries and co mpared to recent experimental results. Numerical simulations of the growth equation exhibit a saturation of the surface morphology for large film thic kness originating from the inclusion of the density inhomogeneities. Furthe r-more, we argue why moundlike surface structures observed on vapor deposit ed amorphous films are not the result of the Grinfeld instability.