Characteristics of Li/MoO3-x thin film batteries

Solid-state lithium batteries fabricated by thin film technology are attrac ting attention as micro-batteries. The thin film battery structure means th at they have a small discharge capacity, therefore, it is necessary to incr ease the cell capacity per unit area of the cathode film for practical use. We fabricated thin film batteries with fairly thick MoO3-x cathode films, which had a larger specific capacity than other cathode films (e.g., LiMn2O 4 film). We then examined the cell performance of our thin film batteries. When the discharge current density was 10 muA/cm(2), the batteries had disc harge capacities of 290 muA h/cm(2) per unit area, and this value is the hi ghest among typical thin film batteries reported to date. (C) 2001 Elsevier Science B.V. All rights reserved.