Thin film deposition techniques (PVD)

Authors
Steinbeiss, E
Citation
E. Steinbeiss, Thin film deposition techniques (PVD), LECT N PHYS, 569, 2001, pp. 298-315
Categorie Soggetti
Current Book Contents","Current Book Contents
Journal title
SPIN ELECTRONICS → ACNP
ISSN journal
00758450
Volume
569
Year of publication
2001
Pages
298 - 315
Database
ISI
SICI code
0075-8450(2001)569:<298:TFDT(>2.0.ZU;2-Q