An organosilicon compound, hexamethylcyclotrisilazane (HMCTS), was photolyz
ed in a solid film at 84 K with an ArF excimer laser. A polymeric film was
prepared as a result of polymerization and/or crosslinking using a reactive
species such as 1-(methyslilyl)methanimine, generated by photolysis. At ro
om temperature in air, the film changed into a polymer having siloxane unit
s. However, fragments generated by laser irradiation of HMCTS in the frozen
film made a similar polymer film having a siloxane structure on a PVA film
in air. The polymeric film with siloxane units prepared by the cryogenic l
aser ablation method displayed hydrophobic properties.