Superconducting MgB2 thin films were prepared on Al2O3(0001) and MgO(100) s
ubstrates. Boron thin films were deposited by the electron-beam evaporation
followed by postannealing process with magnesium. Proper postannealing con
ditions were investigated to grow good superconducting MgB2 thin films. The
x-ray diffraction patterns showed randomly oriented growth of MgB2 phase i
n our thin films. The surface morphology was examined by scanning electron
microscope and atomic force microscope. Critical current density (J(C)) mea
sured by transport method was about 10(7) A/cm(2) at 15 K, and superconduct
ing transition temperature (T-C) was similar to 39 K in the MgB2 thin films
on Al2O3. (C) 2001 American Institute of Physics.