ELECTRODEPOSITION OF RU CO COMPOSITIONALLY MODULATED MULTILAYERS/

Operating conditions for the production of thin coatings of ruthenium- cobalt alloys have already been achieved. The present work provides da ta on the electrodeposition of modulated ruthenium-cobalt alloys using a sulfate-sulfamate electrolyte and a double-current pulse plating te chnique. Alloy modulation was examined by glow discharge optical spect roscopy. Coulometric measurements during anodic dissolution of cobalt- ruthenium films make it possible to determine exactly the cobalt conte nt and approximate amount of ruthenium in the films.