SCANNING ACOUSTIC FORCE MICROSCOPE INVESTIGATIONS OF SURFACE ACOUSTIC-WAVES

We report on the investigation of surface acoustic wave (SAW) fields b y scanning acoustic force microscopy (SAFM), reaching submicron latera l resolution. The SAFM is based on a standard atomic force microscope and utilizes the nan-linear force curve in the sense of a mechanical d iode. The surface oscillation therefore leads to a shift of the cantil ever's rest position. With SAFM we investigated SAW transducers operat ing at frequencies above 600 MHz. We measured the dynamic behaviour of the wave pattern within the transducers when sweeping the frequency a nd found a local influence of mass loading on the standing SAW amplitu de. Furthermore, tbe first images of SAW diffraction and scattering ar e shown. (C) 1997 by John Wiley & Sons, Ltd.