InGaAlP-based red vertical-cavity surface-emitting lasers (VCSELs) have bee
n successfully fabricated using the proton-implanted planar structure suita
ble for mass production. A low threshold current of 2.5 mA with 666-nm lasi
ng wavelength at room temperature and a high maximum continuous wave (CW) l
asing temperature of 60 degreesC have been achieved. In addition, it was fo
und that the maximum CW lasing temperature decreased linearly with the incr
ease in the device diameter. This was because the thermal resistance of the
device was approximately inversely proportional to the device diameter.