H. Van Meer et K. De Meyer, A 2-D analytical threshold voltage model for fully-depleted SOI MOSFETs with halos or pockets, IEEE DEVICE, 48(10), 2001, pp. 2292-2302
The exact solution of the two-dimensional (2-D) Poisson's equation has been
analytically derived for fully-depleted (FD) SOI MOSFETs with Halos or poc
kets. The approach uses a three-zone Green s function solution technique. E
xplicit equations i 1 for the 2-D electrical potential as well as for both
front- and back-side threshold voltages have been derived. The accuracy of
the equations has been verified by a 2-D numerical device simulator. From t
he presented results, it can be concluded that B B the analytically derived
model for the electrical potential and threshold voltages are in good agre
ement with 2-D numerical simulation data.