A compact V-band filter/antenna integrated receiver IC built on Si-micromachined BCB suspended structure

We propose a three-dimensional structure on a planar substrate employing mi cromachining technology. A low-loss suspended structure incorporating a BCB membrane employing deep trench etching technology has been newly proposed. A micromachined suspended line structure using BCB membrane film enables u s to realize a low loss planar resonator, which achieved an unloaded qualit y factor (Q-factor) of more than 280 at 60 GHz. We design low-loss filters and antennas built into silicon in a 60 GHz band. A law-loss filter realize s an insertion loss of 1.0 dB at 60 GHz and a patch antenna obtains a 3% ba ndwidth. In addition, we demonstrate a 60 GHz receiver front-end IC incorpo rating the planar filter and the antenna, and obtain good results. These te chniques enable us to integrate various functions into a compact package ev en in millimeter-wave bands.