IN-SITU SURFACE MONITORING-SYSTEM FOR SYNCHROTRON MIRRORS UNDER HIGH HEAT LOAD

A portable electro-optical system capable of real-time measurements of surface slope distortions down to 0.5 mu rad is described; the system is limited primarily by its short-term stability. The system employs an angle measurement technique that, in combination with the least-squ ares signal extraction method, reduces system fluctuations, In additio n, a multireflection technique is used to enhance the detectable resol ution, Although designed for use with mirrors for synchrotron radiatio n sources, this system has the flexibility to be applied to other opti cal components. The prototype system has been tested on a sample mirro r piece, and preliminary results are presented. A brief discussion abo ut the extension of this metrology unit to adaptive optics is also giv en. (C) 1997 optical Society of America.