The transformation to perovskite phase of Pb0.91La0.09Zr0.65Ti0.35O3 (9/65/
35) films on r-sapphire and resulting annealed microstructures were examine
d by transmission electron microscopy. A random equiaxed polycrystalline gr
ain morphology (approximately 600 nm) was observed after rapid-thermal anne
aling or furnace annealing when the as-deposited (radio-frequency-magnetron
sputtering) films were predominantly pyrochlore. However, an interesting p
aired-plate structure was revealed after furnace annealing when the as-depo
sited films were fully perovskite. The average size of such a split precipi
tate was 35 nm in width and 150 nm in length.