Dielectric response of mesoporous silica films was monitored as a function
of several gas-phase chemical species. The effects of humidity, ammonia, an
d methane on dielectric constant and dissipation factor of films subjected
to different chemical treatments are described. Dielectric constant and dis
sipation factor of partially dehydroxylated films were found to be highly s
ensitive to both water vapor and ammonia in air. The capacitive devices bas
ed on mesoporous silica films show potential for use in chemical sensors.