Amorphization in the Fe/Hf multilayered films was achieved by Ar+ ion beam
assisted deposition (IBAD) technique. The Ar+ ion energy used was from 4 to
12 keV. Several amorphous alloys were obtained in Hf-rich films and their
compositions were located in a range of 50 similar to 80 at. pct Hf. The am
orphization mechanism was also discussed.