Formation processes of negative ions in low-pressure plasmas are not yet fu
lly understood: as a rule experiments reveal higher negative ion density th
an predicted by the models. In this work we report near-surface generation
of negative ions. This hitherto neglected formation mechanism appears to be
important in low-pressure discharges and can have large impacts on the bul
k plasma chemistry. We monitor energy-resolved positive and negative ion fl
uxes arriving at the electrodes in an oxygen parallel-plate radio-frequency
(rf, 13.56 MHz) and dc glow plasmas by means of a quadrupole mass spectrom
eter. Negative ions formed in the plasma volume are observed by extracting
them through an orifice in the anode of a dc glow discharge. Unexpectedly,
we record large negative ion signals at the cathode of a dc discharge and a
t the grounded electrode of an rf discharge. These ions are formed in the p
lasma sheath, in collision processes involving high-energy species. We prop
ose an efficient mechanism of negative ion generation due to ion pair forma
tion in the sheath. (C) 2001 American Vacuum Society.