J. Li et al., Radio frequency siliconization: An approach to the coating for the future large superconducting fusion devices, J VAC SCI A, 19(5), 2001, pp. 2149-2154
Radio frequency (rf) siliconization has been carried out on the HT-7 superc
onducting tokamak in the presence of a high magnetic field, which is a try
on superconducting tokamaks. Three different procedures of rf siliconizatio
n have been tested and a very promising method to produce high quality sili
con films was found after comparing the film properties and plasma performa
nce produced by these three different procedures. The Si/C films are amorph
ous, semitransparent, and homogeneous throughout the layer and adhere firml
y to all the substrates. The advantages of silicon atoms as a powerful radi
ator and a good oxygen getter have been proved. An outstanding merit of rf
siliconization to superconducting devices is its fast recovery after a seri
ous degradation of the condition due to the leakage of air to good wall con
ditions. A wider stable operation region has been obtained and plasma perfo
rmance is improved immediately after each siliconization due to significant
reduction of impurities. Energy confinement time increases more than 50% a
nd particle confinement time increases by a factor of 2. The lifetime of th
e silicon film is more than 400 standard ohmic heated plasma discharges. Si
mulation shows that the confinement improvement is due to the reduction of
the electron thermal diffusivity in the outer region of the plasma. (C) 200
1 American Vacuum Society.