The effects of thermal annealing on CdTe/CdS heterojunctions have been inve
stigated by means of the grazing incidence x-ray scattering technique. Chan
ges in the interface morphology due to heat treatment are characterized qua
ntitatively in terms of a set of parameters including the interfacial rough
ness and correlation lengths of the layer thickness fluctuations. (C) 2001
American Vacuum Society.