Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling

Authors
Langford, RM Petford-Long, AK
Citation
Rm. Langford et Ak. Petford-long, Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling, J VAC SCI A, 19(5), 2001, pp. 2186-2193
Citations number
57
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
19
Issue
5
Year of publication
2001
Pages
2186 - 2193
Database
ISI
SICI code
0734-2101(200109/10)19:5<2186:POTEMC>2.0.ZU;2-C
Abstract
The preparation of transmission electron microscopy cross-section specimens using focused ionbeam milling is outlined. The "liftout" and "trench" tech niques are both described in detail, and their relative advantages and disa dvantages are discussed. Artifacts such as ion damage to the top surface an d sidewalls of the cross-section specimens, and methods of reducing them, a re addressed. (C) 2001 American Vacuum Society.