The corrosion behavior of CrNx and (Ti1-xCrx)N coatings, produced by reacti
ve ion plating using thermal and electron beam evaporation, was investigate
d. To deposit the CrNx coatings, Cr was evaporated by resistance heating an
d CrNx coatings of various N/Cr composition ratios were obtained by alterin
g the NH3 flow rate. For deposition of the (Ti1-xCrx)N coatings, Ti and Cr
were evaporated by electron beam and resistant heating, respectively. The T
i and Cr concentrations were controlled by the Ti to Cr evaporation ratio.
Electrochemical properties of the coatings were examined with an EG&G 273 A
potentiostat in a pH 7, 0.9 M NaCl solution. The corrosion behavior of bot
h CrN and (Ti,Cr)N coatings showed a similar trend to that of pure Cr. At v
oltages <0.5 V [versus saturated calomel electrode (SCE)], they showed pass
ivity. However, at voltages >0.5 V (versus SCE), the corrosion current incr
eased abruptly with dissolution of Cr-oxide from the surface oxide layer. (
C) 2001 American Vacuum Society.