Characterization of sputtered indium tin oxide layers as transparent contact material

The electrical, optical, and various mechanical properties of rf sputtered indium tin oxide layers were investigated in terms of electrical resistivit y (four-probe measurement and Hall), optical transparency, scanning transmi ssion electron spectroscopy and x-ray spectroscopy. Whereas the specific co nductivity is. at the lower limit reported in the literature (2 X 10(-4) Om ega cm), and the optical transparency is as high as 90% in the wavelength r ange between 550 and 800 nm, the grain size is between 10 and 25 nm. The st ress is tensile and in the range of 7 kbar after deposition, to drop to 3 k bar after anneal. (C) 2001 American Vacuum Society.