Citation
Ch. Chang et al., Real-time feedback control of electron density in inductively coupled plasmas (vol 19, pg 750, 2001), J VAC SCI A, 19(5), 2001, pp. 2709-2709
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101
→ ACNP
Volume
19
Issue
5
Year of publication
2001
Pages
2709 - 2709
Database
ISI
SICI code
0734-2101(200109/10)19:5<2709:RFCOED>2.0.ZU;2-7