S-PARAMETER-BASED EXPERIMENTAL MODELING OF HIGH-Q-MCM INDUCTOR WITH EXPONENTIAL GRADIENT LEARNING ALGORITHM

Lumped inductors are very desirable passive components in wireless/RF circuits integrated on multichip module (MCM) substrates. This paper m odels the inductor by using on-wafer high frequency measurement, S par ameter formulation and exponential gradient optimization method. A new equivalent circuit model including both lumped and distributed effect s is proposed, Both the magnitudes and phases of all S parameters fit well for all the inductors we built, It is shown that the most effecti ve way to increase the quality factor is to use a high resistivity sub strate, The resulting experimental model provides a solid measurement- verified ground for circuit design and numerical characterization.