Determination of dielectric breakdown Weibull distribution parameters confidence bounds for accurate ultrathin oxide reliability predictions

This paper focuses on reliability methodology for ultrathin oxides. It is c learly shown that not only the sampling, but also the oxide thickness impac ts on the accuracy of the T-50 (50% cumulative failure rate time-to-breakdo wn) and the beta (Weibull slope) determination. An abacus is proposed to mo del confidence bounds and conclusions are drawn in terms of procedure to de sign more efficient and test-time-minimized TDDB experiments for rigorous r eliability predictions. (C) 2001 Elsevier Science Ltd. All rights reserved.