Relevance of contact reliability in HBM-ESD test equipment

Citation
Jc. Reiner et T. Keller, Relevance of contact reliability in HBM-ESD test equipment, MICROEL REL, 41(9-10), 2001, pp. 1397-1401
Citations number
3
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS RELIABILITY
ISSN journal
00262714 → ACNP
Volume
41
Issue
9-10
Year of publication
2001
Pages
1397 - 1401
Database
ISI
SICI code
0026-2714(200109/10)41:9-10<1397:ROCRIH>2.0.ZU;2-D
Abstract
Unreliable contacts in modem HBM-ESD (human body Model electrostatic discha rge) test equipment can reduce the detected HBM-ESD failure level of an int egrated circuit from above 3 kV to below 2 W. As shown both by experiments and simulation, this is the result of charging of internal parasitic capaci tance of the ESD tester and a subsequent spark-induced very fast discharge leading to CDM (charged device model)-like current transients. Consequently , due to the trend to increasing pin-count devices, the importance of the r eliability and self-test capability of ESD test equipment rises. (C) 2001 E lsevier Science Ltd. All rights reserved.